VTTs world-class cleanroom facilities restored to full operational condition

VTT offers world-class research in micro- and nanoelectronics. The VTT cleanroom at Micronova facilities in Espoo, Finland that suffered considerable damage in February because of a fire has now been fully restored to service condition. Research activities are mainly resumed.

The air-conditioning system and most of the cleanroom structures that were damaged in the fire have been completely replaced. Covering a floor area of 1,100 m², the cleanroom suffered considerable damage in the fire, with the cost of renovation and refurnishing estimated at approximately EUR 13.5 million. Main part of the new and restored research equipment has been installed, and process start-up was begun at the same time as the installation work. The facilities are expected to be in full working order and available for research and other activities by the end of the year.

The cleanroom serves research in micro- and nanoelectronics, using equipment such as a CMOS-based production line for integrated circuits and MEMS components, as well as specialised equipment for deep etching in silicon and silicon dioxide. The facilities also house equipment required for materials research, particularly for the needs of nanoelectronics research.

Migration to 150 mm wafer size improves partnering opportunities

Much of the research equipment destroyed in the fire has been replaced with new, equally powerful equipment. For example, migration from 100 mm to 150 mm wafer size in the production of integrated circuits and semiconductor components can be regarded as a significant improvement, furthering VTT's partnering opportunities with the industrial sector.

Micronova

Micronova is a leading centre for excellence in micro- and nanotechnology run jointly by the VTT Technical Research Centre of Finland and the Helsinki University of Technology. There are nearly 300 research specialists working at the Micronova facilities in Otaniemi, Espoo. This building is the largest cleanroom used for micro- and nanoelectronics in the Nordic region. Micronova partners with various universities, research institutes and commercial enterprises in international world-class research.

 


Additional information

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