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PROCESSING OF AC-JVS WAFERS
Project leader: Branch: Information and communication technology, electronics Research partners: MIKES Keywords: Josephson voltage standard, voltage standards, silicon wafers, niobium Abstract: In the project, voltage standards for 1,5 V and 10 V are fabricated by clean room thin film processing technique on 100 mm diameter silicon wafers. Niobium is used as superconductor material. The operating temperature of the devices is 4 K. Record updated: 27.12.2005 Check also for relevant publications |
